LAYOUT DESIGN RULES
Why we need design rules
§ Masks are tooling for manufacturing.
§ Manufacturing processes have inherent limitations in accuracy.
§ Design rules specify geometry of masks which will provide reasonable yields.
§ Design rules are determined by experience.
CMOS PROCESS ENHANCEMENTS
§ Transistors
§ Multiple threshold voltage and oxide thicknesses
§ Silicon on Insulator
§ High Dielectrics
§ Low leakage transistors
§ Higher Mobility
§ Plastic transistors
§ High voltage transistors
